{"id":506,"date":"2019-05-03T08:19:07","date_gmt":"2019-05-03T06:19:07","guid":{"rendered":"https:\/\/www.acxys.com\/?page_id=506"},"modified":"2023-10-12T12:15:45","modified_gmt":"2023-10-12T10:15:45","slug":"modules-depots-plasma-cvd-ulc","status":"publish","type":"page","link":"https:\/\/www.acxys.com\/fr\/equipements-plasma-traitement-surface\/modules-depots-plasma-cvd-ulc\/","title":{"rendered":"ULCoat"},"content":{"rendered":"

[et_pb_section fb_built=\u00a0\u00bb1″ module_class=\u00a0\u00bblddw-entete-responsive\u00a0\u00bb _builder_version=\u00a0\u00bb4.7.7″ background_image=\u00a0\u00bbhttps:\/\/www.acxys.com\/wp-content\/uploads\/2021\/02\/gros-plan-ULcoat-compressee-scaled.jpg\u00a0\u00bb custom_padding=\u00a0\u00bb1%||1%|\u00a0\u00bb z_index_tablet=\u00a0\u00bb500″][\/et_pb_section][et_pb_section fb_built=\u00a0\u00bb1″ _builder_version=\u00a0\u00bb3.22″ custom_padding=\u00a0\u00bb0px||\u00a0\u00bb][et_pb_row _builder_version=\u00a0\u00bb3.25″ animation_style=\u00a0\u00bbslide\u00a0\u00bb animation_direction=\u00a0\u00bbleft\u00a0\u00bb animation_intensity_slide=\u00a0\u00bb10%\u00a0\u00bb][et_pb_column type=\u00a0\u00bb4_4″ _builder_version=\u00a0\u00bb3.25″ custom_padding=\u00a0\u00bb|||\u00a0\u00bb custom_padding__hover=\u00a0\u00bb|||\u00a0\u00bb][et_pb_text module_class=\u00a0\u00bblddw-landing-conteneur blue\u00a0\u00bb _builder_version=\u00a0\u00bb4.9.7″ text_font=\u00a0\u00bb||||||||\u00a0\u00bb header_font=\u00a0\u00bb|600||on|||||\u00a0\u00bb header_text_color=\u00a0\u00bb#ffffff\u00a0\u00bb header_font_size=\u00a0\u00bb20px\u00a0\u00bb z_index_tablet=\u00a0\u00bb500″]<\/p>\n

Decouvrez l\u2019ULCoat mis au point par acxys technologies : la simplicite du depot de couches minces pour de nombreuses applications<\/h1>\n

[\/et_pb_text][et_pb_text _builder_version=\u00a0\u00bb4.9.7″]<\/p>\n

L’ULCoat<\/h2>\n

Avec l\u2019injection d\u2019un pr\u00e9curseur dans le plasma en post-d\u00e9charge, l\u2019ULCoat permet le d\u00e9p\u00f4t de couches minces sur la surface trait\u00e9e.<\/strong><\/p>\n

L\u2019ULCoat est un syst\u00e8me vaporisant et injectant un pr\u00e9curseur sous la buse plasma. L\u2019ULCoat s\u2019utilise coupl\u00e9 avec un g\u00e9n\u00e9rateur ULS OMEGA.<\/strong>
Le module standard est con\u00e7u pour le d\u00e9p\u00f4t d\u2019oxydes de silicium (SiOx) en utilisant un pr\u00e9curseur organom\u00e9tallique. Mais d\u2019autres compositions de films peuvent \u00eatre \u00e9tudi\u00e9es.
Le laboratoire de d\u00e9veloppement de proc\u00e9d\u00e9s d\u2019AcXys Technologies est \u00e0 votre service pour mettre au point l\u2019application qui r\u00e9ponde \u00e0 vos besoins dans le cadre d\u2019un contrat de R&D.<\/p>\n

[\/et_pb_text][et_pb_image src=\u00a0\u00bbhttps:\/\/www.acxys.com\/wp-content\/uploads\/2019\/05\/ul-coat.jpg\u00a0\u00bb align=\u00a0\u00bbcenter\u00a0\u00bb align_tablet=\u00a0\u00bbcenter\u00a0\u00bb align_phone=\u00a0\u00bb\u00a0\u00bb align_last_edited=\u00a0\u00bbon|desktop\u00a0\u00bb _builder_version=\u00a0\u00bb3.23″][\/et_pb_image][et_pb_text _builder_version=\u00a0\u00bb4.9.7″]<\/p>\n

L\u2019ULCoat est disponible en module autonome ou en version int\u00e9grable dans d\u2019autres \u00e9quipements (version OEM)<\/strong>.<\/p>\n

[\/et_pb_text][\/et_pb_column][\/et_pb_row][et_pb_row _builder_version=\u00a0\u00bb3.25″ animation_style=\u00a0\u00bbslide\u00a0\u00bb animation_direction=\u00a0\u00bbtop\u00a0\u00bb animation_intensity_slide=\u00a0\u00bb10%\u00a0\u00bb][et_pb_column type=\u00a0\u00bb4_4″ _builder_version=\u00a0\u00bb3.25″ custom_padding=\u00a0\u00bb|||\u00a0\u00bb custom_padding__hover=\u00a0\u00bb|||\u00a0\u00bb][et_pb_text _builder_version=\u00a0\u00bb4.9.7″]<\/p>\n

La technologie ULCoat<\/h2>\n
    \n
  • – S\u2019utilise avec un module ULS OMEGA<\/li>\n
  • – D\u00e9p\u00f4t de couches minces<\/li>\n
  • – Epaisseur ajustable de 50 \u00e0 1000 nanom\u00e8tres<\/li>\n
  • – Uniformit\u00e9 sup\u00e9rieure +\/- 2%<\/li>\n
  • – Vitesse de traitement moyenne \u00e0 haute jusqu\u2019\u00e0 200 nm.cm2 \/ s<\/li>\n
  • – Version standard optimis\u00e9e pour le d\u00e9p\u00f4t d\u2019oxydes de silicium (SiOx)<\/li>\n<\/ul>\n

    [\/et_pb_text][\/et_pb_column][\/et_pb_row][et_pb_row column_structure=\u00a0\u00bb1_2,1_2″ _builder_version=\u00a0\u00bb3.25″ animation_style=\u00a0\u00bbslide\u00a0\u00bb animation_direction=\u00a0\u00bbtop\u00a0\u00bb animation_intensity_slide=\u00a0\u00bb10%\u00a0\u00bb][et_pb_column type=\u00a0\u00bb1_2″ _builder_version=\u00a0\u00bb3.25″ custom_padding=\u00a0\u00bb|||\u00a0\u00bb custom_padding__hover=\u00a0\u00bb|||\u00a0\u00bb][et_pb_image src=\u00a0\u00bbhttps:\/\/www.acxys.com\/wp-content\/uploads\/2019\/05\/ulc-buse.jpg\u00a0\u00bb align=\u00a0\u00bbcenter\u00a0\u00bb align_tablet=\u00a0\u00bbcenter\u00a0\u00bb align_phone=\u00a0\u00bb\u00a0\u00bb align_last_edited=\u00a0\u00bbon|desktop\u00a0\u00bb _builder_version=\u00a0\u00bb3.23″ max_width=\u00a0\u00bb80%\u00a0\u00bb animation_style=\u00a0\u00bbslide\u00a0\u00bb animation_direction=\u00a0\u00bbtop\u00a0\u00bb animation_intensity_slide=\u00a0\u00bb10%\u00a0\u00bb][\/et_pb_image][\/et_pb_column][et_pb_column type=\u00a0\u00bb1_2″ _builder_version=\u00a0\u00bb3.25″ custom_padding=\u00a0\u00bb|||\u00a0\u00bb custom_padding__hover=\u00a0\u00bb|||\u00a0\u00bb][et_pb_text _builder_version=\u00a0\u00bb3.27.4″ text_font=\u00a0\u00bb||||||||\u00a0\u00bb]<\/p>\n

    La buse d’injection<\/h2>\n

    Le d\u00e9bit de pr\u00e9curseur liquide est contr\u00f4l\u00e9 avant l\u2019injection dans le plasma. Ce module est constitu\u00e9 de plusieurs composants :<\/p>\n

      \n
    • – R\u00e9servoir de pr\u00e9curseur<\/li>\n
    • – Contr\u00f4le de flux de pr\u00e9curseur<\/li>\n
    • – Contr\u00f4le de d\u00e9bit de gaz<\/li>\n
    • – Module de chauffage (facultatif)<\/li>\n<\/ul>\n

      [\/et_pb_text][\/et_pb_column][\/et_pb_row][et_pb_row _builder_version=\u00a0\u00bb3.25″][et_pb_column type=\u00a0\u00bb4_4″ _builder_version=\u00a0\u00bb3.25″ custom_padding=\u00a0\u00bb|||\u00a0\u00bb custom_padding__hover=\u00a0\u00bb|||\u00a0\u00bb][et_pb_text _builder_version=\u00a0\u00bb4.9.7″ animation_style=\u00a0\u00bbslide\u00a0\u00bb animation_direction=\u00a0\u00bbleft\u00a0\u00bb animation_intensity_slide=\u00a0\u00bb10%\u00a0\u00bb hover_enabled=\u00a0\u00bb0″ sticky_enabled=\u00a0\u00bb0″]<\/p>\n

      Interface tactile ergonomique<\/h2>\n
        \n
      • – Ecran tactile int\u00e9gr\u00e9 (ou d\u00e9port\u00e9 si version OEM)<\/li>\n
      • – Pilotage intuitif<\/li>\n
      • – Interface multilingue<\/li>\n
      • – D\u00e9tection et diagnostic des d\u00e9fauts<\/li>\n
      • – Lecture et affichage des consignes en temps r\u00e9el<\/li>\n<\/ul>\n

        [\/et_pb_text][\/et_pb_column][\/et_pb_row][et_pb_row _builder_version=\u00a0\u00bb3.25″][et_pb_column type=\u00a0\u00bb4_4″ _builder_version=\u00a0\u00bb3.25″ custom_padding=\u00a0\u00bb|||\u00a0\u00bb custom_padding__hover=\u00a0\u00bb|||\u00a0\u00bb][et_pb_text _builder_version=\u00a0\u00bb3.27.4″ text_font=\u00a0\u00bb||||||||\u00a0\u00bb header_font=\u00a0\u00bb||||||||\u00a0\u00bb animation_style=\u00a0\u00bbslide\u00a0\u00bb animation_direction=\u00a0\u00bbright\u00a0\u00bb animation_intensity_slide=\u00a0\u00bb10%\u00a0\u00bb]<\/p>\n

        Les gaz compatibles<\/h2>\n
          \n
        • – Air<\/li>\n
        • – Azote<\/li>\n
        • – Autre m\u00e9lange de gaz<\/li>\n<\/ul>\n

          [\/et_pb_text][\/et_pb_column][\/et_pb_row][et_pb_row _builder_version=\u00a0\u00bb3.25″][et_pb_column type=\u00a0\u00bb4_4″ _builder_version=\u00a0\u00bb3.25″ custom_padding=\u00a0\u00bb|||\u00a0\u00bb custom_padding__hover=\u00a0\u00bb|||\u00a0\u00bb][et_pb_text _builder_version=\u00a0\u00bb3.27.4″ text_font=\u00a0\u00bb||||||||\u00a0\u00bb animation_style=\u00a0\u00bbslide\u00a0\u00bb animation_direction=\u00a0\u00bbleft\u00a0\u00bb animation_intensity_slide=\u00a0\u00bb10%\u00a0\u00bb]<\/p>\n

          Avantages de la technologie ULCoat<\/h2>\n
            \n
          • – Basse temp\u00e9rature<\/li>\n
          • – Uniformit\u00e9 en \u00e9paisseur + ou \u2013 2 %<\/li>\n
          • – D\u2019autres types de d\u00e9p\u00f4t peuvent \u00eatre \u00e9tudi\u00e9s<\/li>\n
          • – Existe en version OpenFlow pour le d\u00e9veloppement de nouveaux proc\u00e9d\u00e9s de d\u00e9p\u00f4t<\/li>\n<\/ul>\n

            [\/et_pb_text][\/et_pb_column][\/et_pb_row][\/et_pb_section]<\/p>\n","protected":false},"excerpt":{"rendered":"

            [et_pb_section fb_built=\u00a0\u00bb1″ module_class=\u00a0\u00bblddw-entete-responsive\u00a0\u00bb _builder_version=\u00a0\u00bb4.7.7″ background_image=\u00a0\u00bbhttps:\/\/www.acxys.com\/wp-content\/uploads\/2021\/02\/gros-plan-ULcoat-compressee-scaled.jpg\u00a0\u00bb custom_padding=\u00a0\u00bb1%||1%|\u00a0\u00bb z_index_tablet=\u00a0\u00bb500″][\/et_pb_section][et_pb_section fb_built=\u00a0\u00bb1″ _builder_version=\u00a0\u00bb3.22″ custom_padding=\u00a0\u00bb0px||\u00a0\u00bb][et_pb_row _builder_version=\u00a0\u00bb3.25″ animation_style=\u00a0\u00bbslide\u00a0\u00bb animation_direction=\u00a0\u00bbleft\u00a0\u00bb animation_intensity_slide=\u00a0\u00bb10%\u00a0\u00bb][et_pb_column type=\u00a0\u00bb4_4″ _builder_version=\u00a0\u00bb3.25″ custom_padding=\u00a0\u00bb|||\u00a0\u00bb custom_padding__hover=\u00a0\u00bb|||\u00a0\u00bb][et_pb_text module_class=\u00a0\u00bblddw-landing-conteneur blue\u00a0\u00bb _builder_version=\u00a0\u00bb4.9.7″ text_font=\u00a0\u00bb||||||||\u00a0\u00bb header_font=\u00a0\u00bb|600||on|||||\u00a0\u00bb header_text_color=\u00a0\u00bb#ffffff\u00a0\u00bb header_font_size=\u00a0\u00bb20px\u00a0\u00bb z_index_tablet=\u00a0\u00bb500″] Decouvrez l\u2019ULCoat mis au point par acxys technologies : la simplicite du depot de couches minces pour de nombreuses applications [\/et_pb_text][et_pb_text _builder_version=\u00a0\u00bb4.9.7″] L’ULCoat Avec l\u2019injection d\u2019un pr\u00e9curseur dans le […]<\/p>\n","protected":false},"author":1,"featured_media":0,"parent":17,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"_et_pb_use_builder":"on","_et_pb_old_content":"","_et_gb_content_width":"","footnotes":""},"class_list":["post-506","page","type-page","status-publish","hentry"],"_links":{"self":[{"href":"https:\/\/www.acxys.com\/fr\/wp-json\/wp\/v2\/pages\/506","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.acxys.com\/fr\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/www.acxys.com\/fr\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/www.acxys.com\/fr\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.acxys.com\/fr\/wp-json\/wp\/v2\/comments?post=506"}],"version-history":[{"count":31,"href":"https:\/\/www.acxys.com\/fr\/wp-json\/wp\/v2\/pages\/506\/revisions"}],"predecessor-version":[{"id":5678,"href":"https:\/\/www.acxys.com\/fr\/wp-json\/wp\/v2\/pages\/506\/revisions\/5678"}],"up":[{"embeddable":true,"href":"https:\/\/www.acxys.com\/fr\/wp-json\/wp\/v2\/pages\/17"}],"wp:attachment":[{"href":"https:\/\/www.acxys.com\/fr\/wp-json\/wp\/v2\/media?parent=506"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}